A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing

Daniel Popa*, Richard Hopper, Syed Zeeshan Ali, Matthew Thomas Cole, Ye Fan, Vlad Petru Veigang-Radulescu, Rohit Chikkaraddy, Jayakrupakar Nallala, Yuxin Xing, Jack Alexander-Webber, Stephan Hofmann, Andrea De Luca, Julian William Gardner, Florin Udrea

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
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The gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturized, energy efficient light sources is of critical importance for the monolithic integration of MIR sensors. Here, we present an on-chip broadband thermal MIR source fabricated by combining a complementary metal oxide semiconductor (CMOS) micro-hotplate with a dielectric-encapsulated carbon nanotube (CNT) blackbody layer. The micro-hotplate was used during fabrication as a micro-reactor to facilitate high temperature (>700 C) growth of the CNT layer and also for post-growth thermal annealing. We demonstrate, for the first time, stable extended operation in air of devices with a dielectric-encapsulated CNT layer at heater temperatures above 600 C. The demonstrated devices exhibit almost unitary emissivity across the entire MIR spectrum, offering an ideal solution for low-cost, highly-integrated MIR spectroscopy for the Internet of Things.

Original languageEnglish
Article number22915
JournalScientific Reports
Issue number1
Publication statusPublished - 25 Nov 2021

Bibliographical note

Funding Information:
We acknowledge funding from EPSRC (EP/S031847/1, EP/S030247/1, EP/P005152/1). V.-P. V.-R. acknowledges EPSRC Doctoral Training Award (EP/M508007/1) and support from NPL, and J.A.W. acknowledges the support of his Royal Society Dorothy Hodgkin Research Fellowship.

Publisher Copyright:
© 2021, The Author(s).

ASJC Scopus subject areas

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