A focused-ion-beam-fabricated micro-paddle resonator for mass detection

B Boonliang, Philip Prewett, J Hedley, Jon Preece, Christopher Hamlett

Research output: Contribution to journalArticle

6 Citations (Scopus)


An experimental microelectromechanical system paddle resonator was made using focused ion beam fabrication from a 200 nm thick silicon nitride membrane and investigated using a laser vibrometer for resonant frequency detection. The fundamental mode was found to be torsional, as required, with a resonant frequency of 1.38 MHz and Q of 1070 at a test pressure of 20 mu bar. The mass sensitivity was 55 ag Hz(-1), close to the results of analytical and finite element analysis modeling, demonstrating proof of principle.
Original languageEnglish
JournalJournal of Micromechanics and Microengineering
Issue number1
Publication statusPublished - 1 Jan 2008


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