TY - JOUR
T1 - A focused-ion-beam-fabricated micro-paddle resonator for mass detection
AU - Boonliang, B
AU - Prewett, Philip
AU - Hedley, J
AU - Preece, Jon
AU - Hamlett, Christopher
PY - 2008/1/1
Y1 - 2008/1/1
N2 - An experimental microelectromechanical system paddle resonator was made using focused ion beam fabrication from a 200 nm thick silicon nitride membrane and investigated using a laser vibrometer for resonant frequency detection. The fundamental mode was found to be torsional, as required, with a resonant frequency of 1.38 MHz and Q of 1070 at a test pressure of 20 mu bar. The mass sensitivity was 55 ag Hz(-1), close to the results of analytical and finite element analysis modeling, demonstrating proof of principle.
AB - An experimental microelectromechanical system paddle resonator was made using focused ion beam fabrication from a 200 nm thick silicon nitride membrane and investigated using a laser vibrometer for resonant frequency detection. The fundamental mode was found to be torsional, as required, with a resonant frequency of 1.38 MHz and Q of 1070 at a test pressure of 20 mu bar. The mass sensitivity was 55 ag Hz(-1), close to the results of analytical and finite element analysis modeling, demonstrating proof of principle.
U2 - 10.1088/0960-1317/18/1/015021
DO - 10.1088/0960-1317/18/1/015021
M3 - Article
SN - 1361-6439
SN - 1361-6439
SN - 1361-6439
SN - 1361-6439
SN - 1361-6439
SN - 1361-6439
SN - 1361-6439
SN - 1361-6439
VL - 18
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 1
ER -