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A dry single step process for the manufacture of released MEMS structures
Peter Docker, Peter Kinnell, Michael Ward
Mechanical Engineering
Research output
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Article
28
Citations (Scopus)
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Keyphrases
Aspect Ratio
50%
Buried Oxide
50%
Design Rules
50%
Ether
50%
Information Design
50%
MEMS Structure
100%
Microring Resonator
50%
Notch Effect
100%
Number of Features
50%
One-step Process
100%
Processing Route
50%
Processing Stages
50%
Reactive Ions
50%
Silicon-on-insulator
50%
Silicon-on-insulator Wafer
50%
Two-step Processing
50%
Wafer
50%
Engineering
Aspect Ratio
50%
Design Rule
50%
Microelectromechanical System
100%
Micrograph
50%
Oxide Layer
50%
Processing Step
100%
Resonator
50%
Silicon on Insulator
100%
Step Process
100%
Material Science
Microelectromechanical System
100%
Oxide Compound
50%
Resonator
50%
Silicon
100%