A capacitive tactile sensor array for surface texture discrimination

Haseena Muhammad; C Recchiuto; CM Oddo; L Beccai; Carl Anthony; Michael Adams; MC Carrozza; Michael Ward

doi:10.1016/j.mee.2011.01.045

A capacitive tactile sensor array for surface texture discrimination

Haseena Muhammad, C Recchiuto, CM Oddo, L Beccai, Carl Anthony, Michael Adams, MC Carrozza, Michael Ward

Research output: Contribution to journal › Article

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Abstract

This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture recognition is achieved by scanning surfaces over the sensing array and assessing the frequency spectrum of the sensor outputs. (C) 2011 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1811-1813
Number of pages	3
Journal	Microelectronic Engineering
Volume	88
Issue number	8
DOIs	https://doi.org/10.1016/j.mee.2011.01.045
Publication status	Published - 1 Aug 2011

Keywords

Tactile sensor
MEMS
Capacitive sensor
Biomimetic

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10.1016/j.mee.2011.01.045

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abstract = "This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture recognition is achieved by scanning surfaces over the sensing array and assessing the frequency spectrum of the sensor outputs. (C) 2011 Elsevier B.V. All rights reserved.",

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AU - Muhammad, Haseena

AU - Recchiuto, C

AU - Oddo, CM

AU - Beccai, L

AU - Anthony, Carl

AU - Adams, Michael

AU - Carrozza, MC

AU - Ward, Michael

PY - 2011/8/1

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AB - This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture recognition is achieved by scanning surfaces over the sensing array and assessing the frequency spectrum of the sensor outputs. (C) 2011 Elsevier B.V. All rights reserved.

KW - Tactile sensor

KW - MEMS

KW - Capacitive sensor

KW - Biomimetic

U2 - 10.1016/j.mee.2011.01.045

DO - 10.1016/j.mee.2011.01.045

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VL - 88

SP - 1811

EP - 1813

JO - Microelectronic Engineering

JF - Microelectronic Engineering

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A capacitive tactile sensor array for surface texture discrimination

Abstract

Keywords

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