A capacitive tactile sensor array for surface texture discrimination

Haseena Muhammad, C Recchiuto, CM Oddo, L Beccai, Carl Anthony, Michael Adams, MC Carrozza, Michael Ward

Research output: Contribution to journalArticle

76 Citations (Scopus)


This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture recognition is achieved by scanning surfaces over the sensing array and assessing the frequency spectrum of the sensor outputs. (C) 2011 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)1811-1813
Number of pages3
JournalMicroelectronic Engineering
Issue number8
Publication statusPublished - 1 Aug 2011


  • Tactile sensor
  • MEMS
  • Capacitive sensor
  • Biomimetic


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