100 GHz ultra-high Q-factor photonic crystal resonators

William J. Otter, Stephen Hanham, Nick M. Ridler, Giuseppe Marino, Norbert Klein, Stepan Lucyszyn

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)
139 Downloads (Pure)


We demonstrate an ultra-high Q-factor photonic crystal resonator operating in the millimeter-wave band, which is suitable for use as an integrated sensing platform. Experimental results show that at 100 GHz a loaded Q-factor of 5 000 and 8 700 can be achieved with a strongly and weakly coupled cavity design, respectively. The uncertainty in the experimental results has been analyzed and a new technique of propagating uncertainty in S-parameter measurements for the determination of Q-factor is given. The result of this uncertainty analysis gives an unloaded Q-factor of 9 040 ± 300; being fundamentally limited to ∼10 000 by the intrinsic dielectric loss of the high resistivity silicon substrate. Utilizing standard bulk-micromachining of silicon, the resonators can be monolithically integrated into RFICs and MMICs for applications including liquid and gas sensing.

Original languageEnglish
Pages (from-to)151-159
Number of pages9
JournalSensors and Actuators, A: Physical
Early online date11 Jul 2014
Publication statusPublished - 15 Sept 2014


  • Bulk micromachining
  • Electromagnetic band gap
  • Photonic crystal
  • Q-factor
  • Resonator
  • Silicon

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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