| Original language | Japanese |
|---|---|
| Pages (from-to) | 291-297 |
| Journal | Journal of the Vacuum Society of Japan |
| Volume | 56 |
| Publication status | Published - 2013 |
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Research output: Contribution to journal › Article › peer-review
| Original language | Japanese |
|---|---|
| Pages (from-to) | 291-297 |
| Journal | Journal of the Vacuum Society of Japan |
| Volume | 56 |
| Publication status | Published - 2013 |