Project Details
| Short title | Sensitivity Enhancement and Adaptation of Various Process Steps on High Resoulution E-Beam Resists |
|---|---|
| Status | Finished |
| Effective start/end date | 1/04/02 → 31/12/04 |
Funding
- ROHM & HAAS ELECTRONIC MATERIALS
Sensitivity Enhancement and Adaptation of Various Process Steps on High Resoulution E-Beam Resists
- Palmer, Richard (Principal Investigator)
- Preece, Jon (Co-Investigator)
- Robinson, Alex (Co-Investigator)