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Sensitivity Enhancement and Adaptation of Various Process Steps on High Resoulution E-Beam Resists
Palmer, Richard
(Principal Investigator)
Preece, Jon
(Co-Investigator)
Robinson, Alex
(Co-Investigator)
Physics and Astronomy
Chemistry
Chemical Engineering
Overview
Project Details
Short title
Sensitivity Enhancement and Adaptation of Various Process Steps on High Resoulution E-Beam Resists
Status
Finished
Effective start/end date
1/04/02
→
31/12/04
Funding
ROHM & HAAS ELECTRONIC MATERIALS
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