Research output per year
Research output per year
Project Details
| Short title | NANOLACE - Mask Based Lithography for Fast, Large Scale Pattern Generation with Nanometer Resolution |
|---|---|
| Status | Finished |
| Effective start/end date | 1/01/20 → 31/12/24 |
Funding
- European Commission
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Research output
- 1 Article
-
Measurement of the lithographic point-spread function of a focused helium ion beam in negative-tone PMMA and fullerene resists on ultrathin membranes
O'Meara, R., Dhyani, V., Tak, B. R., McClelland, A., Dawson, G., Storey, C., Robinson, A. P. G., Holst, B. & Hobbs, R. G., 11 Jan 2026, In: Microelectronic Engineering. 302, 8 p., 112405.Research output: Contribution to journal › Article › peer-review