Research output per year
Research output per year
Search results
-
2015
Organic hard masks utilizing fullerene derivatives
Palmer, R., Frommhold, A., Robinson, A., Brown, A. & Lada, T., 20 Mar 2015, Organic hard masks utilizing fullerene derivatives.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
5 Citations (Scopus) -
Towards 11nm half-pitch resolution for a negative-tone chemically amplified molecular resist platform for extreme-ultraviolet lithography
Palmer, R., Frommhold, A., Robinson, A., Yang, D., McClelland, A., Roth, J., Ekinci, Y. & Rosamond, M., 20 Mar 2015, Advances in Patterning Materials and Processes XXXI.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
8 Citations (Scopus)