Ion & Electron Swarm Studies of Relevance to Plasma Processing

  • Mayhew, Christopher (Principal Investigator)
  • Kennedy, Richard (Co-Investigator)

Project Details

Short titleIon & Electron Swarm Studies of Relevance to Plasma Processing
StatusFinished
Effective start/end date1/04/99 → 30/09/02

Funding

  • Engineering & Physical Science Research Council