IAA 2012 - FOF: A Fullerene Resist to Enable Next Generation Semiconductor Fabrication

Robinson, Alex (Principal Investigator)

Chemical Engineering

1 Article

1 results

Article
Chemically amplified phenolic fullerene electron beam resist
Yang, D., Frommhold, A., Xue, X., Palmer, R. E. & Robinson, A., 28 Feb 2014, In: Journal of Materials Chemistry C. 2, 8, p. 1505-1512
Research output: Contribution to journal › Article › peer-review

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18 Citations (Scopus)

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