Project Details
Short title | High performance MEMS materials - Nedo international joint research |
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Status | Finished |
Effective start/end date | 1/10/01 → 30/04/04 |
Funding
- Tokyo Institute of Technology
Short title | High performance MEMS materials - Nedo international joint research |
---|---|
Status | Finished |
Effective start/end date | 1/10/01 → 30/04/04 |