Research output per year
Research output per year
Search results
-
2012
Chemically amplified fullerene resists, spin-on fullerene hardmasks and high aspect ratio etching
Frommhold, A., Yang, D., Manyam, J., Manickam, M., Tarte, E., Preece, J., Palmer, R., Robinson, A. P. G. & Tarte, E., 2012, Proceedings of the IEEE Conference on Nanotechnology. 6322209Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
5 Citations (Scopus)