Project Details
Short title | Electron Beam Nano-Resists Using Fullerence Derivatives and Related Compounds |
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Status | Finished |
Effective start/end date | 1/04/00 → 31/03/02 |
Funding
- ANGSTROM TECHNOLOGY PARTNERSHIP
Short title | Electron Beam Nano-Resists Using Fullerence Derivatives and Related Compounds |
---|---|
Status | Finished |
Effective start/end date | 1/04/00 → 31/03/02 |