Chemically Amplified Molecular Resists for Electron Beam Lithography (EPSRC Funded via Loughborough University)

Project Details

Short titleChemically Amplified Molecular Resists for Electron Beam Lithography (EPSRC Funded via Loughborough University)
StatusFinished
Effective start/end date1/10/06 → 31/03/08

Funding

  • Engineering & Physical Science Research Council